The 6-inch MEMS sensor chip production line of Ausong Electronics has been officially put into operation.

SMM News: with the development of biomedical, artificial intelligence, Internet of things, 5G network and other emerging information technology, the traditional manufacturing industry will further transform and upgrade with the help of new technology. MEMS semiconductor sensor chips play a core role in the era of the Internet of things, and the smart sensor industry has become the key to promote the transformation and upgrading of traditional industries, which is of great strategic significance to the economic development and industrial structure optimization of Guangdong-Hong Kong-Macau Greater Bay Area and even our country.

In 2020, Guangzhou Osong Electronics Co., Ltd. officially put into operation the 6-inch MEMS semiconductor sensor chip production line, successfully producing temperature and humidity, flow, gas, differential pressure, wind speed and other sensor chips, and providing MEMS semiconductor chip manufacturing services for some customers in the Pearl River Delta. The completion and commissioning of this production line marks that Ausong Electronics has become the leading production base of MEMS semiconductor sensor chips in South China, which has laid a good foundation for promoting the high-quality development of domestic, especially Guangdong-Hong Kong-Macau Greater Bay Area's MEMS semiconductor sensors.

Ausong Electronics spent a lot of money to build MEMS semiconductor chip production line, the first phase of the project purification workshop area of about 2500 square meters, equipped with wet cleaning area, 100 cleanliness photolithography area, 1000 cleanliness coating area, 1000 cleanliness etching area, 1000 cleanliness ion implantation area and visit channel and so on. Several sets of high-performance wind shower systems are installed in the whole clean workshop to remove dust thoroughly for employees or goods entering the clean room.

The first phase of the production line was established in March 2019 and officially entered the construction stage in June 2019. After 6 months of construction, the infrastructure of the production line has been installed. In 2020, advanced automatic production equipment such as step-by-step projection lithography, double-sided lithography, glue developer, deep silicon etching machine, large beam ion injector, PECVD, LPCVD, oxidation furnace, magnetron sputtering machine, probe table, stress tester, automatic RCA cleaning machine and other advanced automatic production equipment were introduced, and the production line was officially put into operation.

The first phase of the MEMS semiconductor production line of Ausong Electronics is a 500nm MEMS semiconductor process, and the production equipment accounts for about 70% of the total investment. The first phase of the project has successfully produced a variety of high-quality chip products, such as temperature and humidity sensors, air quality sensors, gas sensors, flow sensors, differential pressure sensors and so on. According to the plan, the second phase of the project will build a 350nm process MEMS semiconductor production line in 2021; the third phase of the project will build a 180nm process MEMS semiconductor production line in 2022; after the total project is completed and put into production, the monthly wafer size will reach 40,000 pieces to meet the needs of Ausong Electronics and all kinds of MEMS semiconductor chip OEM needs.

With the arrival of the era of the Internet of things, the Pearl River Delta Economic Zone, as one of the most important manufacturing bases in China, has been in the forefront of the times. After the implementation of the policy of "Guangdong-Hong Kong-Macau Greater Bay Area Development Plan outline", Guangzhou has continuously improved its dominant position as the capital city and economic center of Guangdong Province, the main node city of Belt and Road Initiative New Eurasian Economic Corridor and the strategic fulcrum of maritime cooperation. Based in Guangzhou, Ausong Electronics has broken the monopoly of foreign enterprises in the field of MEMS semiconductor sensors, realized domestic substitution for imports, bravely shouldered the historical mission, and contributed its own strength to the construction of Guangdong-Hong Kong-Macau Greater Bay Area.