[ASML and TNO Collaborate to Advance Mass Production of Photonic Chips]

Published: Jun 24, 2026 13:52

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ASML (ASML.O) and the Netherlands Organisation for Applied Scientific Research (TNO) announced a collaboration to jointly develop and promote the industrialisation of photonic chips. The collaboration will focus on TNO's photonic chip pilot production line under construction at the High Tech Campus in Eindhoven, Netherlands. ASML will provide manufacturing technology support in phases, including DUV and I-Line lithography equipment. Upon commissioning of the project, the facility will have the capacity for mass production of indium phosphide (InP) photonic chips on a 6-inch wafer scale.

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