At the innovation conference held in Yizhuang, Beijing on July 8th, China Electric Power Technology Electronic equipment Group Co., Ltd. (hereinafter referred to as: electrical equipment) announced technological breakthroughs in ion implanter, chemical mechanical polishing equipment (CMP), wet equipment and so on.
Ion implanter is the key equipment in the process of integrated circuit manufacturing, and its difficulty is second only to lithography machine. It changes the surface composition, structure and properties of the material by doping the area near the semiconductor surface.
Li Jin, director of the strategic planning department of electrical equipment, revealed that at present, electrical equipment has realized the localization of full-spectrum products of ion implanters, which can provide one-stop solutions for chip manufacturers.
According to Beijing Yizhuang news, China Electronics Technology Group has also released home-made chemical mechanical polishing equipment, as one of the core equipment of integrated circuit manufacturing, chemical mechanical polishing equipment is an indispensable equipment for copper interconnection process.
Among them, 200mm polishing equipment has entered SMIC, Huahong Hongli, TSMC, United Power and other domestic lines, by SMIC as "the only replacement rate of 100% domestic equipment supplier".
In addition, according to Li Jin, electrical equipment 8-inch chemical mechanical polishing equipment market share of 70% 12-inch CMP into customer verification, excellent performance. Electrical equipment wet process equipment has entered the field of 8-inch integrated circuit epitaxial wafer processing and chip manufacturing.
