Huawei's latest investment in lithography machine to understand the list of domestic industry chain

On the day Huawei launched HarmonyOS 2 (Hongmeng operating system), Tianyanchao revealed that Huawei's Hubble Investment Company began to invest in lithography machines, taking a stake in Beijing Keyi Hongyuan Company, which is controlled by Microelectronics of the Chinese Academy of Sciences.

According to the public xing, the controlling shareholder of Beijing Keyi Hongyuan Optoelectronic Technology Company is the Institute of Microelectronics of the Chinese Academy of Sciences, with a stake of 26.6%. Its main business is the light source system, one of the three core technologies in the lithography machine, and is the first 193nm ArF excimer laser enterprise in China and the third in the world.

The photoresist plate has been relatively strong in recent days, with a cumulative increase of nearly 15% in the past two weeks.

Founder Securities pointed out that the lithography machine, as the first of the seven major equipment in the previous process (lithography machine, etching machine, coating equipment, measuring equipment, cleaning machine, ion implantation machine, other equipment), has a great value content. the proportion of individual investment in manufacturing equipment is as high as 23%, and the technical requirements are extremely high, involving many advanced technologies such as precision optics, precision movement, high-precision environmental control, and so on. Lithography machine is the wisdom crystallization of human civilization, known as the crown pearl of the semiconductor industry.

Founder Securities believes that at present, the world's leading lithography machines are completely monopolized by ASML, Nikon and Canon, with CR3 as high as 99%. In the current situation, it is imperative to realize the domestic replacement of lithography machine, which is of great strategic significance. In the 02 special lithography project, 193nm ArF immersion DUV lithography machine is set to be accepted in December 2020, and its manufacturing process is 28nm. Considering the clarity of this project as the goal of the 13th five-year Plan and the performance and technical advantages of 28nm as a key technology node, the domestic replacement of lithography machine will usher in a new dawn.

Founder Securities Chen Hangzhou suggested that we should pay attention to the lithography industry chain, first, the core components of the lithography machine: Shanghai Microelectronics, responsible for the overall integration of the light source system, Keyi Hongyuan, responsible for the national hope optics of the objective lens system, responsible for the national science precision of the exposure optical system, responsible for the Huazhuo Jingke of the dual workbench, and responsible for the Qier electromechanical immersion system; Second, lithography supporting facilities: including photoresist, lithography gas, photomask, lithography machine defect detection equipment, glue development equipment and so on.

The industry chain of carding lithography machine of founder Securities is shown in the following figure: