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"Science and Technology Innovation Board Daily" reporter learned from ASML that it announced the final specifications of the new model TWINSCANNXE:3600D on the EUV road map, which is the exposure speed of 30mJ/cm2 up to 160wafers per hour, increasing productivity by 18%, and improving the accuracy of machine matching to 1.1nm, and plans to start shipping in the middle of 2021.
The global lithography industry is dominated by ASML of the Netherlands, Nikon of Japan and Canon, with ASML at the top. ASML is the absolute leader in the global lithography industry, with a market share of more than 60%, occupies the largest share of the DUV immersion lithography market, and monopolizes the top EUV lithography market. Nikon's lithography machines are concentrated in the middle and high-end areas, while Canon is concentrated in the low-end areas.
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